August Technologies AXI-930 Macro Defect inspection tool with dual load ports
Product #4631
$39000.00
August AXi930
August AXi930 robot load module
Load ports
Inspection wafer chuck
Asyst load ports
Genmark robot and notch aligner
Genmark controller
Wafer Size: 150-300mm
Macro defect inspection systems
Defect sensitivity to 0.5 microns (user adjustable)
Inspection camera: 1.8 MB monochrome CCD Review camera: 3 CCD color
Illumination: High speed strobe
Continuous scan technology
Vibration isolated stage
Operating system: Windows
Automatic data collecting & reporting
Modular design for enhanced upgradability
Turret assembly
Standard 2D Defect & metrology verification standard NIST CE
Multi-pass High speed focus map sensor: Point sensor
Standard light tower
Wafer loadport (2)
GENMARK (150-300mm)
Single OCR Ionizer
UltraPort
Standard light tower: R/Y/G.
Defect sensitivity to 0.5 microns (user adjustable)
Inspection camera: 1.8 MB monochrome CCD Review camera: 3 CCD color
Illumination: High speed strobe
Continuous scan technology
Vibration isolated stage
Operating system: Windows
Automatic data collecting & reporting
Modular design for enhanced upgradability
Turret assembly
Standard 2D Defect & metrology verification standard NIST CE
Multi-pass High speed focus map sensor: Point sensor
Standard light tower
Wafer loadport (2)
GENMARK (150-300mm)
Single OCR Ionizer
UltraPort
Standard light tower: R/Y/G.
Documents:
| Availability | In Stock |
| Condition | Refurbished |
| Part# | |
| Package Weight | 0 lbs |
| Package Width | 0 IN |
| Package Length | 0 IN |
| Package Height | 0 IN |
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