2021 LEICA EM ACE600 sputter coater with carbon filament holder and 3 axis motorized stage with planetary drive

sn 588400

Date of Manufacture Dec 2021

Sputter coater - Basic unit consisting of:• Metal vacuum chamber 200 mm 150 mm 195 mm• Integrated oil free pumping system with turbo pump and membrane (diaphragm) pump• Integrated film thickness monitor (QSG-quartz crystal measurement) 0.1 nm accuracy. Includes 10 crystals• Automated stage rotation at room temperature• LED vacuum chamber light• Internal metal vacuum chamber shield, easily removable for cleaning• Removable door with large exchangeable safety glass window• Integrated power supply for sputtering, continuously adjustable up to 150mA• Mains cable• USB port for log file download, USB stick• Two blind flanges for cryo upgrade option - Planar magnetron sputter head• Easy target exchange system. No tools or screws required -Automated target shutter, easily removable - Integrated touch screen for automated process programming and saving of log files - Triple safety system (door, cover and software sensors)Carbon thread coater - Basic unit consisting of:• Metal vacuum chamber 200 mm 150 mm 195 mm• Integrated oil free pumping system with turbo pump and membrane (diaphragm) pump• Integrated film thickness monitor (QSG-quartz crystal measurement) 0.1 nm accuracy. Includes 10 crystals• Automated stage rotation room temperature• LED vacuum chamber light• Internal metal vacuum chamber shield, easily removable for cleaning• Removable door with large exchangeable safety glass window• Integrated power supply for carbon thread evaporation• Mains cable• USB port for log file download, USB stick• Two blind flanges for cryo upgrade option - Carbon thread head• Easy target exchange system. No tools or screws required• Torx wrench for loading carbon thread• Brush for cleaning thread remains from head• 25m carbon thread spool - Automated target shutter, easily removable - Integrated touch screen for automated process programming and saving of log files - Triple safety system (door, cover and software sensors) - Operating manual

ACE600 Planetary drive

Planetary drive stage for EM ACE600

For uniform coatings of highly fissured specimen

surfaces.

- 6 planets with pin holes (ø 3,2mm) capable of

holding a variety of SEM Stubs (4 standard

stubs each)

- Simple exchange, no mounting required

- Fully integrated

ACE600 motorized stage with 3-Axis rotation

- 3 axis (rotation, height, tilt) motorized stage with touch

screen interface

- 104mm table holds 25 standard SEM specimen

mounts with Ø3.2mm pin

Hint: This stage is recommended for best utilization of

ACE600 features. It can be easily exchanged with a

manual or cryo stage